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20XV International Symposium on Self-Propagating High-Temperature Synthesis
STRUCTURE AND PROPERTIES OF h-ZrB2 AND h-Z^/a-BN COATINGS DEPOSITED BY MAGNETRON SPUTTERING OF THE SHS-TARGETS
Ph. V. Kiryukhantsev-Korneev*", A. Kozlova", N. S. Kozlova", and E. A. Levashov"
aNational University of Science and Technology MISiS, Moscow, 119049 Russia *e-mail: [email protected]
DOI: 10.24411/9999-0014A-2019-10063
Hard Zr-B-(N) films were deposited by DC magnetron sputtering of the ZrB2 target in Ar + N2 (0, 10, 15, 25, and 100% N2). The target was manufactured by means of self-propagating high-temperature synthesis. The structure, chemical and phase composition of films were studied by high resolution transmission and scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, Raman and infrared spectroscopy, energy-dispersive analysis, and glow discharge optical emission spectroscopy. The films were characterised in terms of their hardness, elastic modulus, elastic recovery, resistance to cyclic impact loading, friction coefficient, and wear rate. Optical and electrical properties of films were also examined. To evaluate the short- and long-time oxidation resistance, diffusion-barrier properties, resistance to the thermo-cycling, and thermal stability, films were annealed in air atmosphere at temperatures between 500 and 800°C.
Results obtained show that films deposited at low nitrogen partial pressure consist of nanocrystallites of hexagonal ZrB2-phase, 8 nm in size and amorphous regions. N-rich films exhibit fully amorphous structure. Specific optical properties observed for these Zr-B-(N) coatings. The refraction index, coefficients of transmittance and reflectance were measured for wavelength diapason from 200 to 2500 nm. The maximum hardness of 37 GPa, Young's modulus of 400 GPa, and elastic recovery of 73% were determined for films deposited in Ar. The addition of nitrogen significantly increased wear resistance in sliding and impact conditions as well as optical transparence. Films showed good oxidation resistance at 600°C. Mechanical properties remained stable (37-41 GPa) up to 1200°C.
The work was supported by the Russian Foundation for Basic Research (Agreement no. 19-0800187/19).
1. I.V. Iatsyuk, M.V. Lemesheva, Ph.V. Kiryukhantsev-Korneev, E.A. Levashov, Structure and properties of ZrB2, ZrSiB and ZrAlSiB cathode materials and coatings obtained by their magnetron sputtering, IOP Conf. Ser.: Mater. Sci. Eng., 2018, vol. 347, 012028.
2. Ph.V. Kiryukhantsev-Korneev, M.V. Lemesheva, N.V. Shvyndina, E.A. Levashov, A.Yu. Potanin, Structure, mechanical properties, and oxidation resistance of ZrB2, ZrSiB, and ZrSiB/SiBC coatings, Prot. Met. Phys. Chem. Surf, 2018, vol. 54, no. 6, pp. 1147-1156.
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