CC BY
9ISHS 2019 Moscow, Russia
THE Cr-B-C-N FILMS PRODUCED BY PULSED CATHODE-ARC EVAPORATION (P-CAE) OF THE CrB2 ROD MANUFACTURED USING
SHS-COMPACTING
Ph. V. Kiryukhantsev-Korneev
National University of Science and Technology MISiS, Moscow, 119049 Russia
e-mail: [email protected]
DOI: 10.24411/9999-0014A-2019-10062
Hard films in Cr-B-C-N system were deposited by pulsed cathode-arc evaporation (P-CAE) [1] of the CrB2 target in Ar, N2, and C2H4. The target was manufactured by means of self-propagating high-temperature synthesis. The structure, chemical and phase composition of films were studied by high resolution transmission and scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, Raman spectroscopy, energy-dispersive analysis, and glow discharge optical emission spectroscopy. The films were characterised in terms of their hardness, elastic modulus, elastic recovery, friction coefficient, and wear rate. To evaluate the oxidation resistance, diffusion-barrier properties, and thermal stability, films were annealed in air atmosphere at temperatures between 600 and 1000°C.
The coatings had a structure typical for the CAE deposited coatings, with a significant proportion of condensed droplet phase, but the formation of unfavorable columnar morphology was eliminated. The coatings contained crystallites of h-CrB2 and c-CrN phases, as well as a large amount of amorphous phase, the composition of which varied depending on the type of working medium. The coatings obtained in argon showed the highest hardness of 12 GPa, while the coatings obtained in C2H4 medium were characterized by the highest elastic-plastic properties (72% of elastic recovery). The coefficient of friction of coatings applied in Ar, N2, and C2H4 was 0.7, 0.4 and 0.3, respectively. The phase of diamond-like carbon in the latter case led to a decrease in the coefficient of friction due to the high proportion of sp2-bound carbon, which acts as a solid lubricant. Coatings of optimal composition had high resistance to high-temperature oxidation in the temperature range of 600-1000°C. At high temperatures, the oxidation process was accompanied by intense diffusion of boron atoms deep into the substrate.
This research was funded by the Ministry of Education and Science of Russia (State Assignment no. 11.7172.2017/8.9).
1. Ph.V. Kiryukhantsev-Korneev, A.N. Sheveyko, K.A. Kuptsov, A.V. Novikov, D.V. Shtansk, Ti-Cr-B-N coatings prepared by pulsed cathodic-arc evaporation of ceramic TiCrB target produced by SHS, Prot. Met. Phys. Chem. Surf., 2013, vol. 49, no. 6, pp. 677681.
Ph. V. Kiryukhantsev-Korneev
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