CC BY
2The 30th International Conference on Advanced Laser Technologies ALT'23
LD-O-9
Measurement of the absorption of waveguide layers using prismatic input radiation
V.V. Butuzov 1 , V.S. Solovyov 12 , A.S. Timoshenkov 2
1- JSC Research Institute "Ekran " 2-National Research University "MIET ",
e- mail: solov _06_ v @ mail. en
Currently, optoelectronics and photonics technologies are becoming very popular when it is necessary to combine electronics technologies and intensively developing optical technologies. One of the key, necessary directions for this is the creation of optical filters, both with a narrow bandwidth and with a wide one. A characteristic feature of optical materials is the low attenuation during the propagation of light in them compared to materials through which an electric current propagates. Therefore, the quality factor of optical filters can be orders of magnitude greater than electrical ones. Typical values of the quality factor of electrical filters are 10-50, while the quality factor of optical filters can be 10 5 - 10 12 . In order to know in advance what quality factor of the filter can be obtained when using one or another material, it is necessary to know the light losses during the propagation of light in it. In this article, we propose a measurement technique and its specific implementation using the example of measuring the attenuation of light in a layer of titanium dioxide. Layers of titanium dioxide with a thickness of 0.5 to 1 ^m were fabricated by sputtering Ti 3 O 5 onto a quartz substrate using electron beam sputtering technology. In the process of deposition, the layer was further oxidized and, as a result, a layer was formed. TiO 2. For the work, a rutile prism with a refractive index of 2.6 was made. With its help, radiation from the waveguide layer was introduced. The measurements were carried out by fixing the beam track with a camera and processing it with the Gwyddion program . In our experiments, when photographing after processing, we obtained the loss of the waveguide layer 0.4 dB/cm, 0.41 dB/cm and 0.425 dB/cm.
